In this paper, a modification of magnetron sputtering for the deposition of measuring electrodes on polytetrafluoroethylene foil is described. An influence of ejection frequency of the working gas on volume resistivity, surface resistivity, relative permittivity and dielectric loss factor is reported. An effect of aging temperature on some of the material parameters is observed.

中文翻译：

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磁控溅射参数对聚四氟乙烯箔介电性能的影响

在本文中，描述了用于在聚四氟乙烯箔上沉积测量电极的磁控溅射的改进。报告了工作气体喷射频率对体积电阻率、表面电阻率、相对介电常数和介电损耗因子的影响。观察到时效温度对一些材料参数的影响。