Additive manufacturing (AM) methods are being integrated in ceramics fabrication either as the main manufacturing tool or for auxiliary purposes. By using polymers, powders and preceramic formulated materials, AM techniques are pushing towards higher resolution, lower shrinkage and shorter building time. Herein, we present the fabrication of ceramic microstructures (< 200 × 200 × 200 μm³) with sub-micrometer resolution based on two-photon polymerization (TPP). 3D structuring of a preceramic resin by photopolymerization produces a so-called green body. The final ceramic part is obtained after pyrolysis of the green body. The high-resolution 3D shaped structures that we demonstrated could be employed as tools or components for microdevices. We report a lower linear shrinkage of 30% of TPP green bodies from a polysiloxane precursor with low porosity, no cracks and no significant shape distortion after pyrolysis, which implies the potential for highly controllable manufacturing of micro-ceramic parts based on commercially available chemical compounds. The protocol for preparing, fabricating and developing the resin is detailed.

增材制造（AM）方法已作为主要制造工具或辅助用途集成到陶瓷制造中。通过使用聚合物，粉末和陶瓷预配制材料，增材制造技术正在朝着更高的分辨率，更低的收缩率和更短的构建时间发展。在此，我们提出的陶瓷微结构的制造中（<200×200×200μm的³）具有基于双光子聚合（TPP）的亚微米分辨率。通过光聚合对陶瓷前树脂进行3D结构化处理，可形成所谓的生坯。在生坯热解后获得最终的陶瓷零件。我们演示的高分辨率3D形状结构可以用作微型设备的工具或组件。我们报告说，聚硅氧烷前体具有低孔隙率，热裂后无裂纹且无明显形变的线性收缩率仅为TPP生坯的30％，这意味着基于市售化合物的微陶瓷零件的高度可控制造潜力。详细介绍了制备，制造和显影树脂的方案。