Abstract According to the design requirement of friction pairs in MicroElectroMechanical Systems (MEMS), four kinds of hard coatings TiN, TiCN, AlTiN and diamond like carbon (DLC) were selected to form 16 kinds of combinations. The tribological characteristics of the 16 kinds of combinations were investigated by using ball-on-disc tester. The wear mechanisms of the coating combinations were analyzed by scanning electron microscopy (SEM), Energy-dispersive spectroscopy (EDS) and Raman spectroscopy. The results show that the combinations of AlTiN balls/different coated discs and DLC discs/different coated balls have smaller wear and friction coefficient (less than 0.2). Among them, the wear mechanism of the friction pairs composed of AlTiN balls and four kinds of coated discs is extremely slight abrasive wear. The wear mechanism of the combinations of DLC discs and the coated balls (except for the AlTiN ball) is mainly adhesive wear, accompanied by slight abrasive wear. Furthermore, in the design of the coating combination, the coating with high hardness and good wear resistance should be chosen as the fixed part, while the coating with slightly lower hardness and surface roughness is selected as the moving part. Such design principle can ensure good tribological characteristics of coating friction pairs in the MEMS.

中文翻译：

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几种硬涂层组合的干摩擦和磨损性能

摘要 根据微机电系统(MEMS)摩擦副的设计要求，选用TiN、TiCN、AlTiN和类金刚石(DLC)4种硬质涂层，形成16种组合。采用球盘试验机对16种组合的摩擦学特性进行了研究。通过扫描电子显微镜（SEM）、能量色散光谱（EDS）和拉曼光谱分析了涂层组合的磨损机制。结果表明，AlTiN球/不同涂层圆盘和DLC圆盘/不同涂层球的组合具有较小的磨损和摩擦系数（小于0.2）。其中，由AlTiN球和四种涂层盘组成的摩擦副的磨损机制为极轻微的磨粒磨损。DLC 圆盘与涂层球（AlTiN 球除外）组合的磨损机制主要是粘着磨损，并伴有轻微的磨粒磨损。此外，在涂层组合的设计中，应选择硬度高、耐磨性好的涂层作为固定部分，而选择硬度和表面粗糙度稍低的涂层作为活动部分。这种设计原理可以保证MEMS涂层摩擦副具有良好的摩擦学特性。而运动部件则选用硬度和表面粗糙度稍低的涂层。这种设计原理可以保证MEMS涂层摩擦副具有良好的摩擦学特性。而运动部件则选用硬度和表面粗糙度稍低的涂层。这种设计原理可以保证MEMS涂层摩擦副具有良好的摩擦学特性。