The results of the successful laser drilling of 30 – 200 μm in diameter microholes in glass ranging in thickness from 0.1 to 0.8 mm are reported. High-quality holes together with high process performance are achieved by using in the hole piercing process an immersion cooling liquid in contact with the bottom surface of the glass.

中文翻译：

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激光打孔玻璃中的微孔

据报道，成功地在直径从0.1到0.8 mm的玻璃中钻出了直径为30 – 200μm的微孔，从而获得了成功的结果。通过在穿孔过程中使用与玻璃底表面接触的浸没冷却液，可以实现高质量的孔和高加工性能。