This paper reports on frequency tunable MEMS magnetoelectric sensors. Different designs are studied in respect to magnetoelectric voltage coefficient and frequency tunability. Compared to state-of-the-art ME sensors, the presented ME resonators display a highly reversible and linear frequency tuning, enabled by applying a DC voltage to piezoelectric actuators. A frequency shift of up to 0.2 Hz/V is demonstrated for a sensor with a limit of detection of 128 pT/Hz0.5 at resonance frequency of 13 kHz. This sensor type is of particular interest for vector field sensors and sensor arrays in bio-magnetic applications, where sensors with either identical resonance frequencies or precisely defined frequency spacing are required.

中文翻译：

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用于检测弱磁场的频率可调谐振磁电传感器

本文报道了频率可调的 MEMS 磁电传感器。在磁电电压系数和频率可调性方面研究了不同的设计。与最先进的 ME 传感器相比，所提出的 ME 谐振器显示出高度可逆的线性频率调谐，通过向压电致动器施加直流电压来实现。对于在 13 kHz 谐振频率下检测限为 128 pT/Hz0.5 的传感器，显示了高达 0.2 Hz/V 的频移。这种传感器类型特别适用于生物磁应用中的矢量场传感器和传感器阵列，其中需要传感器具有相同的共振频率或精确定义的频率间隔。