Abstract Zinc oxide (ZnO) films were coated on flexible Polyethylene Terephthalate (PET) substrate by direct current magnetron sputtering of zinc in the presence of reactive oxygen. Afterward, the films were irradiated with 300 keV silver ions (Ag+1) through Pelletron Accelerator by changing irradiation dose from 1 × 1011 to 1 × 1014 ions/cm2 in four equal steps. The penetration depth of Ag+1 inside the film was found to be about 70 nm by SRIM (stopping and range of ions in matter) software. Structural parameters of unirradiated and irradiated films were examined by X-ray diffraction. The comparison showed significant degradation of ZnO (002) peak intensity and increase in its widening after irradiation. The Ag+1 irradiation of ZnO at 1 × 1011 ions/cm2 decreased its lattice constant (c). However, the lattice constant was increased with a further increase of the irradiation dose. The absorption edge of ZnO was shifted to higher wavelengths with the increase of Ag+1 dose, as shown by the ultraviolet–visible absorption spectra. The Four Probe measurement revealed a consistent decrease in the electrical resistivity of ZnO after Ag+1 irradiation up to 1 × 1013 ionscm−2. Then it remained constant with a further increase of the ions dose.

中文翻译：

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柔性基板上银离子辐照ZnO薄膜的结构、光学和电学特性

摘要 在活性氧存在下，通过直流磁控溅射锌在柔性聚对苯二甲酸乙二醇酯 (PET) 基材上涂覆氧化锌 (ZnO) 薄膜。然后，通过将辐射剂量从 1 × 1011 改变到 1 × 1014 离子/cm2 以四个相等的步骤，用 300 keV 银离子 (Ag+1) 通过 Pelletron Accelerator 照射薄膜。通过SRIM（物质中离子的停止和范围）软件发现Ag+1在薄膜内部的渗透深度约为70nm。通过 X 射线衍射检查未辐照和辐照膜的结构参数。比较表明 ZnO (002) 峰强度显着降低，辐照后其展宽增加。ZnO 以 1 × 1011 离子/cm2 的 Ag+1 辐照降低了其晶格常数 (c)。然而，晶格常数随着辐照剂量的进一步增加而增加。如紫外-可见吸收光谱所示，随着 Ag+1 剂量的增加，ZnO 的吸收边向更高的波长移动。四探针测量显示，在 Ag+1 照射至 1 × 1013 ionscm-2 后，ZnO 的电阻率持续降低。然后随着离子剂量的进一步增加，它保持不变。