The phenomenon of mode localization is explored theoretically and experimentally on two mechanically or electrostatically coupled beam resonators. Lumped parameter models are used to simulate the response of the systems. The eigenvalue problems are solved for both case studies under different stiffness perturbations and coupling strengths. The influence of the side electrode bias on the veering points is also explored. The dynamics of the systems are studied and compared using their frequency response curves under different perturbation and damping scenarios. The effect of damping for different elements of the coupled system is studied and proposed to improve sensitivity in high damping environments. It is observed that the exploitation of mode localization depends primarily on the choice of the resonator of the coupled system to be under direct excitation, its stiffness to be perturbed, and its response to be monitored. The revealed dynamic behaviors show great potential for applications in sensing and mechanical computing. The theoretical findings are validated using experimental case studies of two silicon doubly-clamped mechanically coupled microbeams and two electrostatically coupled microcantilevers. Electrothermal voltage is applied to the mechanically coupled resonators to introduce the stiffness perturbation in order to investigate mode localization. The theoretical and experimental results show good qualitative agreement.

在两个机械或静电耦合的波束谐振器上，从理论和实验上探讨了模式局限现象。集总参数模型用于模拟系统的响应。在不同的刚度扰动和耦合强度下，这两个案例研究都解决了特征值问题。还探讨了侧电极偏压对转向点的影响。研究了系统的动力学特性，并使用它们在不同摄动和阻尼情况下的频率响应曲线进行了比较。研究并提出了阻尼对耦合系统不同元件的影响，以提高高阻尼环境下的灵敏度。可以看出，模式定位的利用主要取决于直接激励下耦合系统谐振器的选择，其刚度要受到扰动以及其响应要受到监测。揭示的动态行为显示出在传感和机械计算中的巨大潜力。使用两个硅双钳位机械耦合微束和两个静电耦合微悬臂的实验案例研究验证了理论发现。电热电压被施加到机械耦合的谐振器以引入刚度扰动，以研究模式定位。理论和实验结果显示出良好的定性一致性。揭示的动态行为显示出在传感和机械计算中的巨大潜力。使用两个硅双钳位机械耦合微束和两个静电耦合微悬臂的实验案例研究验证了理论发现。电热电压被施加到机械耦合的谐振器以引入刚度扰动，以研究模式定位。理论和实验结果显示出良好的定性一致性。揭示的动态行为显示出在传感和机械计算中的巨大潜力。使用两个硅双钳位机械耦合微束和两个静电耦合微悬臂梁的实验案例研究验证了理论发现。电热电压被施加到机械耦合的谐振器以引入刚度扰动，以研究模式定位。理论和实验结果显示出良好的定性一致性。电热电压被施加到机械耦合的谐振器以引入刚度扰动，以研究模式定位。理论和实验结果显示出良好的定性一致性。电热电压被施加到机械耦合的谐振器以引入刚度扰动，以研究模式定位。理论和实验结果显示出良好的定性一致性。