Abstract Aluminium doped zinc oxide (AZO) films were achieved using co-spray method. Different techniques including UV–Visible (UV–Vis), X-ray diffraction (XRD), electrochemical impedance spectroscopy (EIS), Fourier transform infrared (FTIR) and photoelectrochemical (PEC) were used to characterize the obtained films. XRD indicated that all films exhibited single-phase ZnO hexagonal Wurtzite structure. AZO films showed a transparency more than 80% in the visible region with direct optical band gap ranging between 3.24 and 3.28 eV. A broad absorption band due to the stretching vibration of Zn–O bond located at 410 cm−1 was observed for all samples. In the high frequency region, all EIS spectra have only one single half-circle and the diameter decreases in the presence of a specific amount of Al (2–4%). The values of the exponent αCPE from EIS results indicated that ZnO:Al films presented a good homogeneity and smoothness. PEC study indicated that the film generates maximum photocurrents up to 1.2 μA/cm2 for a doping level of 2%.

中文翻译：

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共喷涂技术制备的Al掺杂ZnO薄膜的光电化学性能增强

摘要 采用共喷涂法制备了铝掺杂氧化锌（AZO）薄膜。使用不同的技术，包括紫外-可见光（UV-Vis）、X 射线衍射（XRD）、电化学阻抗谱（EIS）、傅里叶变换红外（FTIR）和光电化学（PEC）来表征所获得的薄膜。XRD 表明所有薄膜都表现出单相 ZnO 六方纤锌矿结构。AZO 薄膜在可见光区的透明度超过 80%，直接光学带隙范围在 3.24 到 3.28 eV 之间。由于位于 410 cm-1 处的 Zn-O 键的伸缩振动，所有样品均观察到宽吸收带。在高频区域，所有 EIS 光谱只有一个半圆，并且在特定量的 Al (2-4%) 存在时直径会减小。EIS 结果的指数αCPE 值表明ZnO:Al 薄膜呈现出良好的均匀性和光滑度。PEC 研究表明，对于 2% 的掺杂水平，该薄膜可产生高达 1.2 μA/cm2 的最大光电流。