The high-spectral-resolution detection of hard X-rays (E > 20 keV) is a challenging and nearly unexplored area in space astrophysics. Traditionally hard X-ray detectors present moderate spectral resolutions, although few tens of eV one could open new frontiers in the study of nuclear processes and high-temperature plasma dynamics in energetic processes. This can be achieved by using cryogenic microcalorimeters. Within a research activity aimed at developing arrays of neutron transmutation-doped germanium (NTD-Ge) microcalorimeters for the high-spectral-resolution detection (about 50 eV@60 keV) of hard X-rays (20 keV 60 μm) bismuth absorber arrays. The adopted technological process and the study of related process parameters are discussed; preliminary results on produced arrays are given.

中文翻译：

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用于 NTD-Ge 硬 X 射线微量热仪的铋吸收体阵列的制造

硬 X 射线（E > 20 keV）的高光谱分辨率探测是空间天体物理学中一个具有挑战性且几乎未开发的领域。传统的硬 X 射线探测器呈现出中等的光谱分辨率，尽管几十 eV 的探测器可以在核过程和高能过程中的高温等离子体动力学研究中开辟新的领域。这可以通过使用低温微量热计来实现。在一项旨在开发中子嬗变掺杂锗 (NTD-Ge) 微量热计阵列的研究活动中，用于硬 X 射线（20 keV 60 μm）铋吸收体阵列的高光谱分辨率检测（约 50 eV@60 keV） . 讨论了采用的工艺流程和相关工艺参数的研究；给出了生成的阵列的初步结果。