Abstract Sapphire capillaries manufactured with high efficiency and precision are needed for use in laser–plasma accelerators. A hybrid manufacturing process combining femtosecond laser machining and diamond tool micromilling was applied. By using a femtosecond laser mounted on a 5-axis machine, a capillary with a groove width of 630 µm and length of 90 mm was fabricated on a sapphire plate within 5 h. The surface roughness of the bottom of the cylinder groove was finished to 7.1 nm in Sa by milling with a polycrystalline diamond end mill.

中文翻译：

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使用飞秒激光加工和金刚石工具微铣削优化制造蓝宝石毛细管的实验研究

摘要 激光-等离子体加速器需要高效率和高精度制造的蓝宝石毛细管。应用了一种结合飞秒激光加工和金刚石刀具微铣削的混合制造工艺。通过使用安装在 5 轴机器上的飞秒激光器，在 5 小时内在蓝宝石板上制造了凹槽宽度为 630 µm 和长度为 90 mm 的毛细管。通过用多晶金刚石立铣刀铣削，圆柱槽底部的表面粗糙度在 Sa 中精加工至 7.1 nm。