The non-bipolar operation of a stack-type piezo actuator causes non-bidirectional motion of the piezo-driven stage. This paper proposes a piezo-driven XY stage with a monolithic compliant parallel mechanism for fully bidirectional operation. Four prismatic-prismatic flexure-based joint chains are arranged antagonistically at the four sides of a target platform of the XY stage. The motion of each axis is conducted by differential force between piezo actuators in two actuating mechanisms arranged at both sides of a target platform along the same axis. Due to this antagonistic arrangement, the home position of the target platform is at the center position of the full operating range, and the target platform is movable along the positive and negative directions from the home position. Mathematical modeling of the proposed compliant mechanism is performed using a matrix-based equation of motion. The compliant mechanism is designed to satisfy design constraints using the mathematical model, and the designed mechanism is then analyzed using the Finite Element Method (FEM). The proposed bidirectional operation of the piezo-driven XY stage is demonstrated and the performance of the stage is subsequently described in terms of the response time, bandwidth and resolution.

堆叠式压电执行器的非双极性操作会导致压电驱动平台的非双向运动。本文提出了一种压电驱动的XY位移台，该位移台具有单片顺应性并联机构，可实现完全双向操作。四个棱柱-棱柱形挠曲基关节链相对地排列在XY平台的目标平台的四个侧面。每个轴的运动是由沿同一轴布置在目标平台两侧的两个执行机构中的压电执行器之间的力差进行的。由于这种对抗性布置，目标平台的原始位置位于整个工作范围的中心位置，并且目标平台可从原始位置沿正向和负向移动。使用基于矩阵的运动方程式对所提出的柔顺机构进行数学建模。使用数学模型将顺应性机制设计为满足设计约束，然后使用有限元方法（FEM）对设计的机制进行分析。演示了所建议的压电驱动XY位移台的双向操作，随后根据响应时间，带宽和分辨率描述了位移台的性能。