In this paper, an insulator-semiconductor-insulator plasmonic waveguide is proposed based on InSb in the terahertz range. The proposed plasmonic waveguide is an integrated temperature and refractive index sensor. The plasmon-induced transparency used in this integrated sensor reduces the sensor bandwidth by coupling two rolled-up micro-tubes. The sensitivity of the proposed sensor for temperature and refractive index can reach 4388 nm/K and 149.1 μm/RIU, respectively. The sensitivity of the sensor for refractive index is at least 805.95% larger than that of our previous work and the figure of merit is the order of 41.3. The proposed sensor has a wide range of potential lab-on-chip applications and can measure the variations of temperature and refractive index in the material under sensing.

本文提出了一种基于InSb的太赫兹范围的绝缘体-半导体-绝缘体等离子体激元波导。提出的等离子体波导是集成的温度和折射率传感器。通过集成两个卷起的微管，此集成传感器中使用的由等离激元引起的透明性降低了传感器带宽。所提出的传感器对温度和折射率的灵敏度分别可以达到4388 nm / K和149.1μm/ RIU。传感器对折射率的灵敏度比我们之前的工作至少高出805.95％，品质因数约为41.3。拟议中的传感器具有广泛的潜在芯片实验室应用范围，并且可以测量感测材料中温度和折射率的变化。