Abstract Barium stannate (BaSnO3, BS) and silver composite thin films are deposited on flexible polyethylene terephthalate (PET) substrates by magnetron sputtering. The effects of structural design on electrical and optical properties of the BS/Ag/BS tri-layer flexible thin films are investigated systematically. The BS layers can enhance the transmittance significantly, due to the fact that reflection of light from the Ag layer and PET substrate can be suppressed by BS layers. The tri-layer thin films show the high figure of merit of 16.66 × 10−3 Ω−1 and the large commutation quality factor of 197, while the average optical transmittance in the visible light range is above 84% and the sheet resistance is 10.52 Ω/sq. In addition, the flexible tri-layer thin films show outstanding mechanical flexibility, adhesion to PET substrate and stability at high temperature.

中文翻译：

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结构设计对柔性 BaSnO3-Ag 复合薄膜电学、光学和机械性能的影响

摘要 通过磁控溅射在柔性聚对苯二甲酸乙二醇酯 (PET) 衬底上沉积锡酸钡 (BaSnO3, BS) 和银复合薄膜。系统地研究了结构设计对 BS/Ag/BS 三层柔性薄膜电学和光学性能的影响。由于 BS 层可以抑制来自 Ag 层和 PET 基材的光反射，因此 BS 层可以显着提高透射率。三层薄膜表现出16.66 × 10-3 Ω-1的高品质因数和197的大换向品质因数，而可见光范围内的平均透光率在84%以上，薄层电阻为10.52 Ω/平方 此外，柔性三层薄膜表现出出色的机械柔韧性，