Present work reports thermal conductivity measurement in a commercial soda–lime–silica glass substrate by the transient 3\(\omega\) method using a unique, custom-built in-house setup. Most importantly, a micro-heater (MH) cum temperature sensor is fabricated for this purpose. At first the MH-patterned mask is developed by CO₂ laser cutting technique on quartz glass. The MH (L-5 mm, W-65–70 μm, t-140 nm) is fabricated by sputtered Au thin film on the commercial soda–lime–silica glass substrate. Following evaluations of the thermo-electrical properties, microstructure and surface morphology of the Au thin film, the TCR of the MH is noted to be 0.001469 K⁻¹. Finally, the thermal conductivity of the soda–lime–silica glass substrate is measured as 1.46 W·m⁻¹·K⁻¹. The error in measurement calculated by the Kline–McClintock method is < 7 %.

中文翻译：

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瞬态3 $$ \ omega $$ω法用创新方法制造的基于金薄膜的微加热器/温度传感器来测量苏打–石灰–二氧化硅玻璃的热导率

目前的工作报告了采用独特的定制内部设置，通过瞬态3 \（\ omega \）方法在商用钠钙玻璃石英玻璃基板中进行热导率测量。最重要的是，为此目的制造了一个微加热器（MH）和温度传感器。首先，通过CO ₂激光切割技术在石英玻璃上开发出MH图案的掩模。MH（L-5毫米，W-65-70微米，t-140纳米）是通过在市售钠钙玻璃石英玻璃基板上溅射金薄膜制成的。在评估Au薄膜的热电性质，微观结构和表面形态之后，注意到MH的TCR为0.001469K ^-1。最后，钠钙玻璃石英玻璃基板的导热系数为1.46 W·m^-1 ·K ^-1。用Kline–McClintock方法计算的测量误差小于7％。