We present a compact tunable Fabry–Pérot filter operating at mid-infrared wavelengths (3–5 µ m) with novel actuators based on liquid crystal elastomers (LCEs). These are a new class of shape-memory materials with potential for achieving large reversible actuation based on different external stimuli. For actuating the Fabry–Pérot filter, microheaters and thermo-actuated LCE layers were fabricated as spacers between two Bragg mirrors allowing a controlled change of the air-filled resonator. The ability to integrate LCEs with standard microfabrication techniques was thus demonstrated. The full-width at half maximum of the filter transmission peak is 143 nm at 4.58 µ m. A tuning range of 260 nm in the second interference order is realized by applying a maximum voltage of 7.3 V.

中文翻译：

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由液晶弹性体驱动的紧凑型可调谐中红外法布里-珀罗滤光片

我们介绍了一种紧凑的可调谐Fabry-Pérot滤波器，该滤波器可在中红外波长（3-5 µm）下运行，并具有基于液晶弹性体（LCE）的新型执行器。这些是新型的形状记忆材料，具有根据不同的外部刺激实现大型可逆驱动的潜力。为了启动法布里-珀罗滤波器，微加热器和热驱动LCE层被制造为两个布拉格反射镜之间的垫片，从而可以控制充气谐振器的变化。因此证明了将LCE与标准微细加工技术集成的能力。滤光片透射峰的半峰全宽在4.58 µm处为143 nm。通过施加7.3 V的最大电压，可以以第二个干扰阶数实现260 nm的调谐范围。