Paschen’s law and deviation from Paschen’s law are studied in a face to face gas sensor based on Mn helical sculptured thin films with conical shape as cathode and anode electrodes. The sensor’s performance was investigated at dynamic pressures ranging from 0.1 to 1000 mbar and 3 to 200 μ m gaps between the two electrodes and for nitrogen, air and carbon monoxide gases. Results showed that at distances more than 10 μ m the Paschen’s law is satisfied but at lower than 10 μ m distances between the two electrodes and pressures more than 250 mbar deviations occur from the Paschen’s law. Selectivity results of the sensor showed that under all conditions studied in this work and for all gases there is a good resolution between the results and this enhances with gas pressure. Comparison of the results of the present sensor with those reported in the literature showed higher sensitivity of the present work for different gases investigated.

中文翻译：

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Mn锥形雕刻薄膜作为气体传感器的两个电极的设计和工程：电离和场发射研究

在以圆锥形Mn螺旋雕刻薄膜作为阴极和阳极电极的面对面气体传感器中，研究了Paschen定律和Paschen定律的偏离。在动态压力范围为0.1至1000 mbar和两个电极之间的间隙为3至200μm的氮气，空气和一氧化碳气体中研究了传感器的性能。结果表明，当距离大于10μm时，帕申定律得到满足，但是当两个电极之间的距离小于10μm时，压力超过250 mbar时会发生偏离帕申定律的现象。传感器的选择性结果表明，在这项工作研究的所有条件下，对于所有气体，结果之间都有良好的分辨率，并且随着气体压力的提高而提高。