Abstract Grinding as a pre-treatment method for HF-HNO3-H2O solution etching of diamond wire sawn (DWS) multi-crystalline (multi-Si) silicon wafers was proposed and researched. Significant improvement in morphological uniformity and decrease in light reflectivity of the wet acid etched surface textures were achieved with the pre-treatment. The photoelectric-conversion efficiency gain of solar cells fabricated with the pretreated DWS multi-Si wafers was 0.32%, compared to solar cells fabricated with the same batch of untreated wafers in an identical production line. The grinding pre-treatment was observed to restructure the superficial layer of DWS multi-Si wafers. The surface modification layer was believed to be more easily reacted with the wet acid etching solution, proving responsible for the improvement of photoelectric-conversion efficiency of solar cells. This method could provide a new research idea for the wet acid texturization of DWS multi-Si wafers.

中文翻译：

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金刚石线锯多晶硅片表面湿酸织构研磨预处理

摘要 提出并研究了研磨作为金刚石线锯 (DWS) 多晶 (multi-Si) 硅片 HF-HNO3-H2O 溶液蚀刻的预处理方法。通过预处理实现了湿酸蚀刻表面纹理的形态均匀性的显着改善和光反射率的降低。与在同一生产线上使用相同批次的未处理晶片制造的太阳能电池相比，使用预处理的 DWS 多晶硅晶片制造的太阳能电池的光电转换效率增益为 0.32%。观察到研磨预处理重构了 DWS 多晶硅晶片的表面层。认为表面改性层更容易与湿酸蚀刻溶液反应，证明负责提高太阳能电池的光电转换效率。该方法可为DWS多晶硅片的湿酸制绒提供新的研究思路。