Abstract This paper presents the results of the study of the composition, structure and morphology of ZnO–Co3O4 ceramic targets before and after laser ablation by the KrF excimer laser. X-ray diffraction analysis showed that the composition of the targets changes under the thermal effects of laser radiation: a new phase of CoO of the cubic structure is formed (a = 4.25 A). The radial distribution of elements in the ZnO–Co3O4 targets after ablation by the KrF excimer laser was discovered for the first time. The atomic concentration of cobalt in the center was determined to be several times higher than its concentration at the edge of the targets. This can be explained by the thermal model of laser-semiconductor interaction. The morphology of the targets surface after the laser ablation was discovered to undergo significant changes. Pulsed nanosecond laser radiation induces the formation of center-oriented cone-shaped structures and micro-whiskers on the target surface. It was determined that the higher is the concentration of doping impurities in the target, the greater is the number of structures observed on the surface. The formation of “cones” and microwhiskers is explained by the generalized growth model of the vapor–liquid–crystal mechanism.

中文翻译：

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脉冲激光辐射下ZnO-Co3O4靶材表面中心取向丝状微结构的生长

摘要 本文介绍了在 KrF 准分子激光器激光烧蚀前后 ZnO-Co3O4 陶瓷靶的成分、结构和形貌的研究结果。X 射线衍射分析表明，靶的成分在激光辐射的热效应下发生变化：形成立方结构的 CoO 新相（a = 4.25 A）。首次发现了 KrF 准分子激光烧蚀后 ZnO-Co3O4 靶中元素的径向分布。中心的钴原子浓度被确定为靶边缘浓度的几倍。这可以通过激光-半导体相互作用的热模型来解释。发现激光烧蚀后目标表面的形态发生了显着变化。脉冲纳秒激光辐射会导致在目标表面形成中心取向的锥形结构和微晶须。确定靶中掺杂杂质的浓度越高，在表面上观察到的结构数量越多。“锥体”和微晶须的形成可以通过气相-液晶机制的广义生长模型来解释。