Abstract Ni–Ti–based shape memory alloys (SMAs) have found widespread use in the last 70 years, but improving their functional stability remains a key quest for more robust and advanced applications. Named for their ability to retain their processed shape as a result of a reversible martensitic transformation, SMAs are highly sensitive to compositional variations. Alloying with ternary and quaternary elements to fine-tune the lattice parameters and the thermal hysteresis of an SMA, therefore, becomes a challenge in materials exploration. Combinatorial materials science allows streamlining of the synthesis process and data management from multiple characterization techniques. In this study, a composition spread of Ni–Ti–Cu–V thin-film library was synthesized by magnetron co-sputtering on a thermally oxidized Si wafer. Composition-dependent phase transformation temperature and microstructure were investigated and determined using high-throughput wavelength dispersive spectroscopy, synchrotron X-ray diffraction, and temperature-dependent resistance measurements. Of the 177 compositions in the materials library, 32 were observed to have shape memory effect, of which five had zero or near-zero thermal hysteresis. These compositions provide flexibility in the operating temperature regimes that they can be used in. A phase map for the quaternary system and correlations of functional properties are discussed with respect to the local microstructure and composition of the thin-film library.

中文翻译：

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NiTiCuV四元薄膜库中微观结构和相变的组合合成和高通量表征

摘要 Ni-Ti 基形状记忆合金 (SMA) 在过去 70 年中得到广泛应用，但提高其功能稳定性仍然是实现更强大和更先进应用的关键。SMA 因其可逆马氏体相变而保持加工形状的能力而得名，它对成分变化高度敏感。因此，与三元和四元元素合金化以微调 SMA 的晶格参数和热滞后成为材料探索中的一个挑战。组合材料科学允许通过多种表征技术简化合成过程和数据管理。在这项研究中，Ni-Ti-Cu-V 薄膜库的组成分布是通过磁控共溅射在热氧化的 Si 晶片上合成的。使用高通量波长色散光谱、同步加速器 X 射线衍射和温度相关电阻测量来研究和确定组成相关的相变温度和微观结构。在材料库中的 177 种成分中，观察到 32 种具有形状记忆效应，其中 5 种具有零或接近零的热滞后。这些组合物在它们可以使用的操作温度范围内提供了灵活性。关于薄膜库的局部微结构和组合物讨论了四元系统的相图和功能特性的相关性。和温度相关的电阻测量。在材料库中的 177 种成分中，观察到 32 种具有形状记忆效应，其中 5 种具有零或接近零的热滞后。这些组合物在它们可以使用的操作温度范围内提供了灵活性。关于薄膜库的局部微结构和组合物讨论了四元系统的相图和功能特性的相关性。和温度相关的电阻测量。在材料库中的 177 种成分中，观察到 32 种具有形状记忆效应，其中 5 种具有零或接近零的热滞后。这些组合物在它们可以使用的操作温度范围内提供了灵活性。关于薄膜库的局部微结构和组合物讨论了四元系统的相图和功能特性的相关性。