Currently there has an ever-growing interest in inorganic solid-state electrolytes (iSEs), given the fact that traditional organic liquid electrolytes (oLEs) have become a major limiting factor for next-generation high-energy lithium-ion batteries (LIBs) and beyond. In this context, iSEs are currently undergoing an intensive investigation in order to accomplish solid-state batteries (SSBs) with reliable safety, longer lifetime, lower cost, and higher energy and power density. To date there have been many methods developed for synthesizing iSEs. Among them, atomic layer deposition (ALD) has recently emerged as a new technique with exceptional capabilities to enable atomic-scale rational designs, in situ uniform and conformal growth, low process temperature, and high operational flexibility, and large variety of material choices. To this end, in this work we conduct the first comprehensive survey on iSEs by ALD, covering 6 material categories, 15 iSEs, and 25 processes. We outline 4 technical strategies with ALD processes and elucidate the underlying mechanisms. Furthermore, we make a thorough account of the promising applications of the iSEs in LIBs and lithium batteries and clarify their distinguished benefits for securing excellent electrochemical performance. We expect that this work will greatly motivate more efforts in pursuing excellent iSEs using ALD.

鉴于传统的有机液体电解质（oLE）已成为下一代高能锂离子电池（LIB）和锂离子电池的主要限制因素，目前对无机固态电解质（iSE）的兴趣与日俱增。超越。在这种情况下，iSE目前正在深入研究，以实现具有可靠安全性，更长寿命，更低成本以及更高能量和功率密度的固态电池（SSB）。迄今为止，已经开发了许多用于合成iSE的方法。其中，原子层沉积（ALD）最近作为一种新技术而出现，它具有出色的功能，可以原位进行原子级的合理设计。均匀且共形的生长，较低的工艺温度，较高的操作灵活性以及多种材料选择。为此，在这项工作中，我们对ALD的iSE进行了首次综合调查，涵盖6个材料类别，15个iSE和25个过程。我们概述了ALD流程的4种技术策略，并阐明了潜在的机制。此外，我们充分考虑了iSE在LIB和锂电池中的应用前景，并阐明了它们在确保出色的电化学性能方面的显着优势。我们希望这项工作将极大地激发人们为使用ALD追求卓越的iSE而付出的更多努力。