An essential element to realize lithium-ion microbatteries is an effective and conformal thin film solid state electrolyte over irregular or porous structures with specific composition and controlled elemental spatial distribution. Atomic layer deposition is a surface reaction based and non-line-of-sight technique that can rationally design an optimal electrolyte material, including high conductivity for lithium ions; adhesion to the substrate; uniformity over large area; thermal, mechanical, and electrical stability; and reproducibility required to integrate this deposition method into a manufacturing process. This review focuses on the current state-of-the-art development of a thin film solid state electrolyte, highlights the tunability of the electrical and electrochemical properties by controlling the composition and the microstructure of these materials, and discusses the future outlook in this technologically important area.

中文翻译：

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用于3D锂离子微型电池的薄膜固态电解质的合成和集成

实现锂离子微电池的基本要素是在具有特定组成和受控元素空间分布的不规则或多孔结构上的有效且保形的薄膜固态电解质。原子层沉积是一种基于表面反应的非视线技术，可以合理地设计一种最佳的电解质材料，包括对锂离子的高电导率。对基材的附着力；大面积均匀 热，机械和电稳定性；以及将这种沉积方法整合到制造过程中所需的可重复性。这篇评论着重于薄膜固态电解质的最新发展，