A study of plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor is presented. Both experimental and numerical approaches are used to investigate thin film growth mechanisms and polymer film properties depending on the magnetic field strength. Combining both approaches enables the consistency of the numerical model to be checked while acquiring data for understanding the observed phenomena. Samples are first analyzed by x-ray photoelectron spectroscopy, time of flight secondary ion mass spectrometry, and ion beam analysis to illustrate the differences in degrees of chemical functionalization and cross-linking between the regions of high and low magnetic fields. 3D particle-in-cell Monte Carlo collision simulations are then performed to shed light on experimental results, after implementing a set of electron-cyclopropylamine collision cross sections computed using the R-matrix method. The simulations enable the main radicals produced in the discharge to be tracked by determining their production rates, how they diffuse in the plasma, and how they absorb on the reactor walls. Additionally, the cyclopropylamine ion (C₃H₇N⁺) behavior is followed to bring insights into the respective roles of ions and radicals during the plasma polymerization process.

中文翻译：

---

低压圆柱形磁控管反应器中环丙胺的等离子体聚合：离子和自由基作用的PIC-MC研究

提出了在低压圆柱形磁控管反应器中环丙胺的等离子体聚合研究。实验方法和数值方法都用于研究薄膜的生长机理和聚合物膜的性质，具体取决于磁场强度。结合使用这两种方法，可以在获取数据以了解所观察到的现象的同时检查数值模型的一致性。首先通过X射线光电子能谱，飞行时间二次离子质谱和离子束分析对样品进行分析，以说明高磁场和低磁场区域之间化学功能化程度和交联度的差异。然后执行3D单元内粒子蒙特卡洛碰撞模拟，以阐明实验结果，在实现一组使用R-矩阵方法计算的电子-环丙胺碰撞截面后。通过确定它们的生产率，它们在等离子体中的扩散方式以及在反应器壁上的吸收方式，这些模拟可以跟踪放电中产生的主要自由基。此外，环丙胺离子（C遵循₃ H ₇ N ⁺）行为，以洞察等离子体聚合过程中离子和自由基的各自作用。