A $50\times 50{\mathrm{mm}}^2$ copper target is sputtered by an ion beam at angles of incidence from $0^{°}$ to ${90}^{°}$. The resulting sputter plumes are characterized directionally resolved using a compact and maneuverable force probe. It measures the momentum flux of particles released due to sputtering or reflection inside the sputter plume. Argon ions at energies from 320 to 1220 eV are studied. As expected, the directional distributions are sensitive to the angle of incidence. The ion energy has significant influence only on the magnitude of forces and not their directional distribution. The experimental results are compared with simulations based on the “stopping and range of ions in matter” code (SRIM). The general trends of the directional distributions of forces match reasonably with simulations. However, the simulations overestimate the forces at normal incidence and shallow angles of incidence.

中文翻译：

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定向分析溅射羽流中动量传输的测量值，作为模拟的关键测试

一种 $50\times 50{\mathrm{毫米}}^2$ 铜靶被离子束以与 $0^{°}$ 至 ${90}^{°}$。使用紧凑且可操纵的测力探头可定向分辨得到的溅射羽流。它测量由于溅射羽流内部的溅射或反射而释放的粒子的动量通量。研究了能量为320至1220 eV的氩离子。不出所料，方向分布对入射角敏感。离子能量仅对力的大小有很大影响，而对它们的方向分布没有影响。将实验结果与基于“物质中离子的终止和范围”代码（SRIM）的模拟进行比较。力的方向分布的总体趋势与模拟合理匹配。但是，模拟高估了法向入射角和浅入射角的作用力。