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Mechanical–thermal response of brittle titanium films on polymer substrates: in-situ observations and FE modelling
Journal of Micromechanics and Microengineering ( IF 2.4 ) Pub Date : 2020-05-12 , DOI: 10.1088/1361-6439/ab8906
Xiuli Xue 1, 2 , Chaofeng Zeng 1 , Shibin Wang 2 , Linan Li 2
Affiliation  

The mechanical and interfacial properties of metal films on polymer substrates under combined loading directly affect the function and service life of a variety of devices. However, the temperature effects on the failure mechanisms of brittle films are still unclear. Titanium films with three different thicknesses (100, 250 and 400 nm) were deposited on polymethylmethacrylate substrates; in-situ mechanical–thermal tests were performed on these films under an optical microscope. Experimental results demonstrate that axial compression can result in buckle-delamination of thin films, while an elevated temperature can induce the formation of transverse cracks combined with further interface delamination. Moreover, it was found that the mechanical–thermal responses of the thin films are related to the film thickness, and higher buckle/crack densities can be observed in thinner films. To explore the mechanism of crack initiation, strain analyses were conducted, which reveal tha...

中文翻译:

聚合物基体上脆性钛膜的机械-热响应:原位观察和有限元建模

聚合物基体上的金属膜在复合载荷下的机械和界面特性直接影响各种设备的功能和使用寿命。然而,温度对脆性膜破坏机理的影响尚不清楚。在聚甲基丙烯酸甲酯基板上沉积三种不同厚度(100、250和400 nm)的钛膜;在光学显微镜下对这些薄膜进行了原位机械-热测试。实验结果表明,轴向压缩可导致薄膜屈曲脱层,而高温可导致横向裂纹的形成以及进一步的界面脱层。此外,发现薄膜的机械热响应与薄膜厚度有关,在较薄的薄膜中可以观察到更高的屈曲/裂纹密度。为了探索裂纹萌生的机理,进行了应变分析,揭示了裂纹的产生。
更新日期:2020-05-12
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