ABSTRACT It has been reported that the shape of a measured object can be determined by detecting the change in phase distribution generated by a lateral shift of the object using speckle interferometry. In speckle interferometry technique, it was also reported that the shape of the object beyond the diffraction limit can be measured. In this study, the principle of this method is discussed through experiments and electromagnetic analysis. Accordingly, the results of the experiments and electromagnetic analysis of phase change only under zeroth-order diffraction light through the lateral shift of the object are investigated by shutting out the higher harmonic diffraction lights using an aperture in front of the lens. The results indicate that even if the image of the object cannot be focused upon, three-dimensional shape measurement can be performed by analysing only the zeroth-order diffraction light from the object.

中文翻译：

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物镜前孔径电磁仿真考虑零级衍射光束中物形相位信息的存在性

摘要 据报道，被测物体的形状可以通过使用散斑干涉法检测由物体横向位移产生的相位分布变化来确定。在散斑干涉技术中，也有报道称可以测量超出衍射极限的物体形状。在本研究中，通过实验和电磁分析讨论了该方法的原理。因此，通过使用镜头前的光圈挡住高次谐波衍射光，研究了仅在零级衍射光下通过物体横向移动的相变的实验和电磁分析结果。结果表明，即使物体的图像无法聚焦，