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Modulation of silica layer properties by varying the granulometric state of tetraethyl orthosilicate precursor aerosols during combustion chemical vapour deposition (CCVD)
Aerosol Science and Technology ( IF 2.8 ) Pub Date : 2020-05-20 , DOI: 10.1080/02786826.2020.1762845
Björn Sten Mark Kretzschmar 1 , Paul Bergelt 2 , Daniel Göhler 2, 3 , Fabian Firmbach 1 , Ronny Köcher 1 , Andreas Heft 1 , Michael Stintz 2 , Bernd Grünler 1
Affiliation  

Abstract For the purpose of silica surface layer modulation, a pneumatic-controlled two-substance atomizer with inertia-based coarse droplet separation was operated at different system pressures for tetraethyl orthosilicate precursor aerosol supply during combustion chemical vapor deposition. A comprehensive testing study was performed to characterize the atomizer’s performance characteristics, initial precursor aerosols at the atomizer’s outlet, transformed aerosols before combustion, combustion aerosols and formed layers. Laser diffraction spectrometry, differential electrical mobility analyses and condensation particle counting were used for aerosol characterization with regard to particle size and particle production quantities. Layers were characterized by scanning electron microscopy, atomic force microscopy, spectral ellipsometry, water contact angle measurements and light transmission concerning geometric properties (thickness, surface structure and roughness) and physical behaviors (i.e., optical behaviors, hydrophobicity). Results show a quasi-linear relationship of the ejection mass flow of the pneumatic-controlled atomizer and geometric layer properties which again show a direct relationship to the physical properties. No correlation was found between the aerosols before combustion and the combustion aerosols since the majority of combustion aerosol particles are synthesized solely from the gas phase based on evaporated precursor material. Copyright © 2020 American Association for Aerosol Research

中文翻译:

通过在燃烧化学气相沉积 (CCVD) 过程中改变原硅酸四乙酯前体气溶胶的粒度状态来调节二氧化硅层的特性

摘要 以二氧化硅表层调制为目的,在燃烧化学气相沉积过程中,在不同的系统压力下操作具有基于惯性的粗液滴分离的气动控制的二物质雾化器,以供应原硅酸四乙酯前驱体气溶胶。进行了全面的测试研究以表征雾化器的性能特征、雾化器出口处的初始前体气溶胶、燃烧前转化的气溶胶、燃烧气溶胶和形成的层。激光衍射光谱法、微分电迁移率分析和凝结粒子计数被用于关于粒子大小和粒子产生量的气溶胶表征。通过扫描电子显微镜、原子力显微镜、光谱椭偏仪、与几何特性(厚度、表面结构和粗糙度)和物理行为(即光学行为、疏水性)相关的水接触角测量和光传输。结果显示气动控制雾化器的喷射质量流量与几何层特性之间存在准线性关系,这再次显示出与物理特性的直接关系。在燃烧前的气溶胶和燃烧气溶胶之间没有发现相关性,因为大部分燃烧气溶胶颗粒仅由基于蒸发的前体材料的气相合成。版权所有 © 2020 美国气溶胶研究协会 疏水性)。结果显示气动控制雾化器的喷射质量流量与几何层特性之间存在准线性关系,这再次显示出与物理特性的直接关系。在燃烧前的气溶胶和燃烧气溶胶之间没有发现相关性,因为大部分燃烧气溶胶颗粒仅由基于蒸发的前体材料的气相合成。版权所有 © 2020 美国气溶胶研究协会 疏水性)。结果显示气动控制雾化器的喷射质量流量与几何层特性之间存在准线性关系,这再次显示出与物理特性的直接关系。在燃烧前的气溶胶和燃烧气溶胶之间没有发现相关性,因为大部分燃烧气溶胶颗粒仅由基于蒸发的前体材料的气相合成。版权所有 © 2020 美国气溶胶研究协会 在燃烧前的气溶胶和燃烧气溶胶之间没有发现相关性,因为大部分燃烧气溶胶颗粒仅由基于蒸发的前体材料的气相合成。版权所有 © 2020 美国气溶胶研究协会 在燃烧前的气溶胶和燃烧气溶胶之间没有发现相关性,因为大部分燃烧气溶胶颗粒仅由基于蒸发的前体材料的气相合成。版权所有 © 2020 美国气溶胶研究协会
更新日期:2020-05-20
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