ABSTRACT Silicon carbide (SiC) ceramic has been widely applied to fabricate functional components relying on their excellent physical, chemical and mechanical properties. Meanwhile, it is always highly concerned to seek suitable manufacturing technology and processes for machining such difficult-to-cut material with high-precision, high-efficiency and low-cost. In the present paper, material removal characteristics of reaction-bonded silicon carbide (RB-SiC) and pressureless sintered silicon carbide (S-SiC) were investigated by ultra-precision grinding experiments. #120, #600, #2000 and #12000 diamond cup wheel were employed for coarse, semi-finished, fine and finish grinding, respectively. The surface topographies, surface morphologies and grinding grooves were measured. The results indicated that there are distinguishing material removal characteristics between RB-SiC and S-SiC, and #2000 diamond wheel can be chosen as the final grinding wheel for most high-performance SiC ceramic products. The present study provides a technological reference to ultra-precision grinding of hard materials.

中文翻译：

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超精密磨削碳化硅陶瓷的材料去除特性

摘要 碳化硅（SiC）陶瓷凭借其优异的物理、化学和机械性能，被广泛应用于功能部件的制造。同时，寻求合适的制造技术和工艺来对这种难切削材料进行高精度、高效率、低成本的加工，一直备受关注。本文通过超精密磨削实验研究了反应结合碳化硅（RB-SiC）和无压烧结碳化硅（S-SiC）的材料去除特性。#120、#600、#2000和#12000金刚石杯轮分别用于粗磨、半精磨、精磨和精磨。测量了表面形貌、表面形态和研磨槽。结果表明，RB-SiC和S-SiC具有明显的材料去除特性，大多数高性能SiC陶瓷产品的最终砂轮可以选择#2000金刚石砂轮。本研究为硬质材料的超精密磨削提供了技术参考。