Abstract Material measures are used to calibrate topography measuring instruments. Micro-milling is a suitable process for the manufacturing of areal material measures in particular of material measures featuring freeform surfaces. To improve their surface quality and to minimize their deviations from the target geometry, the cutting parameters feed per tooth respectively feed rate and spindle speed are examined in this study. Dependent on the varied parameters the deviation of the manufactured topography from its target geometry, the deviation to the nominal surface texture parameters and the short-wavelength roughness parameters are evaluated. Two different ball end micro-mills and two different target geometries are chosen to investigate whether the observed dependence on the varied parameters are valid independent from the tool and the target geometry. It is illustrated that the feed rate has a large influence on the dimensional accuracy: the dynamic properties of the axes are identified as reason for the decreasing amplitude with increasing feed rate. The spindle speed only influences the short wavelength roughness and has a minor influence on the surface quality.

中文翻译：

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球头微铣削材料自由曲面测量时不同切削条件、表面粗糙度和尺寸精度的相关性

摘要 实物量具用于校准地形测量仪器。微铣削是用于制造区域材料量度，特别是具有自由曲面的材料量度的合适工艺。为了提高它们的表面质量并最大限度地减少它们与目标几何形状的偏差，本研究中分别检查了每齿进给量和主轴转速的切削参数。根据不同的参数，评估制造的地形与其目标几何形状的偏差、与标称表面纹理参数的偏差和短波长粗糙度参数。选择两种不同的球头微型铣刀和两种不同的目标几何形状来研究观察到的对不同参数的依赖是否独立于刀具和目标几何形状是有效的。结果表明，进给速度对尺寸精度有很大影响：轴的动态特性被认为是振幅随着进给速度增加而减小的原因。主轴转速只影响短波长粗糙度，对表面质量影响较小。