Water droplets are ubiquitous in nature and harvesting droplet kinetic energy has attracted a great deal of attention to meet the increasing worldwide energy demands. In this work, we report a water droplet motion energy harvester with the wafer-level fabrication method, which is based on the water–solid surface contact electrical double layer effect. A theoretical model is established to illuminate the water droplet motion energy harvesting mechanism. Guided by the model, an energy harvester is developed based on Micro Electro-Mechanical Systems compatible process technology, which achieve a wafer-level fabrication. The output performance of the energy harvester has been optimized by decreasing the electrode width and its interval. Experimental results also show that the output voltage can be improved by increasing the droplet volume and decreasing the ionic concentration. The optimized energy harvester exhibits an open circuit output peak voltage of 57.5 mV. This research prov...

中文翻译：

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晶圆级制造方法的水滴运动能量收集器

水滴在自然界无处不在，为了满足全球不断增长的能源需求，收集水滴的动能已引起了广泛的关注。在这项工作中，我们报告了一种采用晶圆级制造方法的水滴运动能量收集器，该方法基于水-固体表面接触电双层效应。建立了理论模型来阐明水滴运动能量的收集机理。在该模型的指导下，基于微机电系统兼容的工艺技术开发了一种能量收集器，该技术可实现晶圆级制造。通过减小电极宽度及其间隔，可以优化能量收集器的输出性能。实验结果还表明，可以通过增加液滴体积和降低离子浓度来提高输出电压。经过优化的能量采集器具有57.5 mV的开路输出峰值电压。这项研究提供...