In this study, a new lithium-silicon-oxynitride (LiSiON) solid-state thin-film electrolyte was investigated for the first time. The LiSiON thin-film electrolyte was deposited by using the RF sputtering technique. In order to compare the LiSiON thin-film electrolyte to lithium phosphorous oxynitride (LiPON), a conventional thin-film electrolyte, were deposited LiPON thin-film electrolytes by using RF sputtering. Surface morphologies and cross-sectional views of the thin-film electrolytes were characterized by using field emission scanning electron microscopy (FE-SEM). The thin-films showed smooth surfaces without any cracks and pinholes. The smooth surfaces are thought to decrease the interfacial resistance between the electrolyte and the electrodes. In addition, surface morphologies were characterized by using atomic force microscopy (AFM). The sputtering rates were calculated using the thicknesses of the thin-films, as obtained from cross-sectional views. The structural properties of the thin-films were characterized using X-ray diffraction (XRD). All thinfilms showed amorphous properties compared to the target material which is a crystalline material. The ionic conductivity of the LiSiON thin-film was 2.47 × 10 −6 (S/cm), which is slightly higher than that of a common thin-film electrolyte LiPON.

中文翻译：

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一种固态薄膜电解质，锂硅氧氮化物，通过用于薄膜电池的射频溅射沉积

在这项研究中，首次研究了一种新的锂 - 硅 - 氮氧化物（LiSiON）固态薄膜电解质。LiSiON 薄膜电解质是通过使用射频溅射技术沉积的。为了将 LiSiON 薄膜电解质与氧氮化锂磷 (LiPON) 进行比较，传统的薄膜电解质通过使用射频溅射沉积 LiPON 薄膜电解质。通过使用场发射扫描电子显微镜（FE-SEM）表征薄膜电解质的表面形貌和截面图。薄膜表面光滑，没有任何裂纹和针孔。光滑的表面被认为会降低电解质和电极之间的界面电阻。此外，通过使用原子力显微镜 (AFM) 表征表面形态。溅射速率是使用从截面图获得的薄膜厚度计算的。使用X射线衍射（XRD）表征薄膜的结构特性。与作为结晶材料的目标材料相比，所有薄膜都显示出非晶特性。LiSiON薄膜的离子电导率为2.47×10 -6 (S/cm)，略高于普通薄膜电解质LiPON的离子电导率。