In this study, we developed a detachable self‐heated‐stage suitable for high‐speed processing of titanium by thermally assisted reactive ion etching (TRIE). The detachable self‐heated stage was designed based on simulation results. The temperature of the stage increases rapidly within 10 minutes with low radio frequency (RF) power, because of the low thermal capacitance. The etch rates of titanium and titanium alloy by the TRIE improved compared with those of titanium and titanium alloy by a regular RIE. In addition, the replacement of the developed stage with another stage became easier than the previous stage.

中文翻译：

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通过反应离子刻蚀开发用于钛高速加工的自热台

在这项研究中，我们开发了一种可拆卸的自加热平台，适用于通过热辅助反应离子刻蚀（TRIE）进行钛的高速加工。根据仿真结果设计了可拆卸的自加热平台。由于低的热电容，在低射频（RF）功率下，平台的温度在10分钟内迅速升高。与常规RIE相比，通过TRIE进行的钛和钛合金的蚀刻速率有所提高。此外，将开发阶段替换为另一个阶段变得比上一个阶段容易。