An impedance measurement technique based on dielectric excitation in oxide semiconductors can provide a highly linear sensing signal over a wide range of gas concentrations.

中文翻译：

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带介电激发的线性气体传感

基于氧化物半导体中介电激发的阻抗测量技术可以在很宽的气体浓度范围内提供高度线性的传感信号。