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Extraordinary performance of semiconducting metal oxide gas sensors using dielectric excitation
Nature Electronics ( IF 33.7 ) Pub Date : 2020-05-11 , DOI: 10.1038/s41928-020-0402-3
Radislav A. Potyrailo , Steven Go , Daniel Sexton , Xiaxi Li , Nasr Alkadi , Andrei Kolmakov , Bruce Amm , Richard St-Pierre , Brian Scherer , Majid Nayeri , Guang Wu , Christopher Collazo-Davila , Doug Forman , Chris Calvert , Craig Mack , Philip McConnell

Semiconducting metal oxides are widely used for gas sensors. The resulting chemiresistor devices, however, suffer from non-linear responses, signal fluctuations and gas cross-sensitivities, which limits their use in demanding applications of air-quality monitoring. Here, we show that conventional semiconducting metal oxide materials can provide high-performance sensors using an impedance measurement technique. Our approach is based on dielectric excitation measurements and yields sensors with a linear gas response (R2 > 0.99), broad dynamic range of gas detection (six decades of concentrations) and high baseline stability, as well as reduced humidity and ambient-temperature effects. We validated the technique using a range of commercial sensing elements and a range of gases in both laboratory and field conditions. Our approach can be applied to both n- and p-type semiconducting metal oxide materials, and we show that it can be used in wireless sensor networks, and drone-based and wearable environmental and industrial gas monitoring.



中文翻译:

使用介电激发的半导体金属氧化物气体传感器的非凡性能

半导体金属氧化物被广泛用于气体传感器。然而,最终的化学阻滞器装置具有非线性响应,信号波动和气体交叉敏感度的问题,这限制了它们在空气质量监测的苛刻应用中的使用。在这里,我们表明,常规的半导体金属氧化物材料可以使用阻抗测量技术提供高性能的传感器。我们的方法基于介电激发测量,并产生具有线性气体响应(R 2 > 0.99),宽动态范围的气体检测(六十年的浓度)和高基线稳定性,以及降低的湿度和环境温度影响。我们在实验室和野外条件下都使用了一系列商业传感元件和各种气体来验证了该技术。我们的方法可以应用于n型和p型半导体金属氧化物材料,并且我们证明了它可以用于无线传感器网络以及基于无人机的可穿戴环境和工业气体监测。

更新日期:2020-05-11
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