Flexible and Highly Sensitive Pressure Sensors with Surface Discrete Microdomes Made from Self‐Assembled Polymer Microspheres Array,Macromolecular Chemistry and Physics

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Flexible and Highly Sensitive Pressure Sensors with Surface Discrete Microdomes Made from Self‐Assembled Polymer Microspheres Array
Macromolecular Chemistry and Physics ( IF 2.5 ) Pub Date : 2020-05-11 , DOI: 10.1002/macp.202000073
Yuan Zhang ₁ , Fei Han ₂ , Yougen Hu ₁ , Yaoxu Xiong _{1,

3} , Han Gu ₁ , Guoqi Zhang ₂ , Pengli Zhu ₁ , Rong Sun ₁ , Ching‐Ping Wong ₄

Affiliation

Flexible pressure sensors with high performances are of great interest for smart wearable devices, health monitoring and artificial electronic skins. However, assembling pressure sensors with low cost, simple structure and high sensitivity are still difficult to achieve. Herein, a fast, novel and facile approach is presented to fabricate piezoresistive flexible pressure sensors with surface uniform dome‐like microstructures which are easily replicated from discrete polystyrene (PS) microspheres array by plasma etching the monolayer array of self‐assembly close‐packed PS microspheres. The flexible pressure sensor with dome‐like array (4.2 µm of diameter, 2.1 µm of height and 1.4 µm of spacing) exhibits a high sensitivity of ‐6.61 kPa⁻¹ in the pressure range below 110 Pa, an ultralow detection limit of 1 Pa, a fast response time of 100 ms, and high stability over 3750 cycles of pressure loading/unloading. The sensor is also successfully demonstrated in monitoring human action and beating a drum. Moreover, a 5 × 5 array of the flexible pressure sensor is fabricated to detect spatial pressure distribution. This work provides a simple and effective protocol to build surface microstructures and improve whole performance of flexible pressure sensors, and shows great prospect in the applications of wearable electronics and human‐machine interaction.

中文翻译：

具有由自组装聚合物微球阵列制成的表面离散微区的柔性，高灵敏度压力传感器

高性能的柔性压力传感器对智能可穿戴设备，健康监测和人造电子皮肤非常感兴趣。然而，仍然难以实现成本低，结构简单和灵敏度高的组装压力传感器。本文提出了一种快速，新颖，简便的方法来制造具有表面均匀的圆顶状微结构的压阻柔性压力传感器，可以通过等离子体蚀刻自组装密排PS的单层阵列轻松地从离散的聚苯乙烯（PS）微球阵列中复制这些压阻柔性压力传感器。微球。带有圆顶状阵列（直径4.2 µm，高度2.1 µm，间距1.4 µm）的柔性压力传感器具有‐6.61 kPa ^-1的高灵敏度在低于110 Pa的压力范围内，超低检测极限为1 Pa，快速响应时间为100 ms，并且在3750次压力加载/卸载循环中具有很高的稳定性。该传感器还成功地用于监视人类行为并敲打鼓。此外，制造了一个5×5的柔性压力传感器阵列来检测空间压力分布。这项工作为建立表面微结构和提高柔性压力传感器的整体性能提供了一种简单有效的协议，并在可穿戴电子设备和人机交互的应用中显示了广阔的前景。

更新日期：2020-05-11

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