Abstract Silver nitrate of desired concentration was doped in the as-synthesized MCM-41 mesoporous silica and the prepared samples are spin coated onto interdigitated thin films with silver on glass slide. The interdigitated thin film electrodes made of silver were fabricated by RF-magnetron sputtering with power of 60 W at 7.2 × 10−2 mbar. The synthesized samples were characterized for structural and morphological features using Fourier-Transform Infrared Spectroscopy (FTIR), BET studies and Transmission Electron Microscopy (TEM). Effect of change in the impedimetric analysis for humidity across the interface has been explored. The impedance of Ag-MCM-41 sample changed five orders of magnitude across the humidity range 11%–93% RH. The xAg-MCM-41, where x = 0.07 g has been the better sample for humidity sensing at room temperature. The impedance studies indicate that the sensor system Ag-doped MCM-41 spin coated on silver sputtered interdigitated electrodes is an appropriate candidate to fabricate humidity sensors with enhanced sensing performance.

中文翻译：

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涂在银溅射叉指电极上的 Ag 掺杂 MCM-41 介孔二氧化硅的阻抗湿度传感研究

摘要 在合成的 MCM-41 介孔二氧化硅中掺杂所需浓度的硝酸银，并将制备的样品旋涂在载玻片上的带银的交叉指状薄膜上。由银制成的叉指薄膜电极是通过射频磁控溅射在 7.2 × 10−2 mbar 下以 60 W 的功率制造的。使用傅里叶变换红外光谱 (FTIR)、BET 研究和透射电子显微镜 (TEM) 对合成样品的结构和形态特征进行表征。已经探索了界面上湿度阻抗分析变化的影响。Ag-MCM-41 样品的阻抗在 11%–93% RH 的湿度范围内变化了五个数量级。xAg-MCM-41，其中 x = 0.07 g，是室温下湿度传感的更好样品。