Structured illumination microscopy (SIM) enables live-cell super-resolution imaging of subcellular structures at high speeds. At present, linear SIM uses free-space optics to illuminate the sample with the desired light patterns; however, such arrangements are prone to misalignment and add cost and complexity to the microscope. Here, we present an alternative photonic chip-based two-dimensional SIM approach (cSIM) in which the conventional glass sample slide in a microscope is replaced by a planar photonic chip that importantly both holds and illuminates the specimen. The photonic chip reduces the footprint of the light illumination path of SIM to around 4 × 4 cm². An array of optical waveguides on the chip creates standing wave interference patterns at different angles, which illuminate the sample via evanescent fields. High-refractive-index silicon nitride waveguides allow a 2.3 times enhancement in imaging spatial resolution, exceeding the usual 2 times limit of SIM. In summary, cSIM offers a simple, stable and affordable approach for performing two-dimensional super-resolution imaging over a large field of view.

结构照明显微镜（SIM）可以对亚细胞结构进行活细胞超高分辨率成像。目前，线性SIM使用自由空间光学器件以所需的光模式照射样品。然而，这样的布置容易失准并且增加了显微镜的成本和复杂性。在这里，我们介绍了另一种基于光子芯片的二维SIM方法（cSIM），其中，显微镜中的传统玻璃样品载玻片被平面光子芯片所代替，该芯片既可以保持并照亮标本，又很重要。该光子芯片可将SIM的光照射路径的占位面积减少到4×4 cm ^2左右。芯片上的光波导阵列会以不同角度产生驻波干涉图，从而通过e逝场照亮样品。高折射率氮化硅波导使成像空间分辨率提高了2.3倍，超过了通常SIM的2倍。总之，cSIM提供了一种简单，稳定且价格合理的方法，可以在较大的视场上执行二维超分辨率成像。