Nafion is a solid electrolyte polymer that can be used as a sensor membrane in microfabricated electrochemical oxygen sensors. It allows ions to be transported between the sensor electrodes and removes the need for a liquid electrolyte. Here we used a series of small square Nafion test structures, fabricated on a variety of materials using standard thin-film patterning techniques, to optimize the design and processing of Nafion membranes. Measurements showed that the choice of photoresist developer is critical. Use of diluted MF-26A developer provided the most effective and manufacturable process. The underlying material also had an influence on robustness, with silicon dioxide and platinum giving the longest membrane lifetime under simulated conditions of use. Membrane size had no clear effect on lifetime, and under optimal processing conditions there were minimal failures even under continuous mechanical agitation for up to six weeks. We also developed test electrodes covered by Nafion, and showed that they were effective at supporting electrochemical oxygen detection.

中文翻译：

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Nafion 聚合物电解质膜设计和微制造的优化

Nafion 是一种固体电解质聚合物，可用作微制造电化学氧传感器中的传感器膜。它允许离子在传感器电极之间传输，并且不需要液体电解质。在这里，我们使用了一系列小方形 Nafion 测试结构，使用标准薄膜图案技术在各种材料上制造，以优化 Nafion 膜的设计和加工。测量表明，光刻胶显影剂的选择至关重要。使用稀释的 MF-26A 显影剂提供了最有效和可制造的过程。底层材料也对坚固性有影响，二氧化硅和铂在模拟使用条件下提供最长的膜寿命。膜尺寸对寿命没有明显影响，在最佳加工条件下，即使在长达六周的连续机械搅拌下，故障也极少。我们还开发了由 Nafion 覆盖的测试电极，并表明它们在支持电化学氧检测方面是有效的。