Abstract The quality control of thin film thickness measurements through the transmission and counting of beta and X-ray radiation has achieved very competitive precision with values to 0.2%. However, when the attenuated intensities by the thin film under measurement is above 90%, the method of counting beta or X-ray radiation generates a dramatic degradation in the precision to 30%. This work presents a new method to obtain and analyze thicknesses of aluminum and copper thin films using energy distribution information provided by a triple gas electron multiplier detector (3GEM). The method is based on the ratio of the peak of the Landau distribution generated by the background detection and the peak of the Gaussian distribution of soft X-ray photons generated by the radiation transmission through the thin films emitted by a 55Fe radiation source. The results improve the thickness measurement precision with respect to the radiation counting method when the intensity attenuated by the thin film is greater than 95% compared to precision values less than or equal to 30% obtained with the counting method to values below 10% achieved with the newly reported energy distribution method.

中文翻译：

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通过 55Fe 辐射透射和使用能量分布分析的背景检测使用三重气体电子倍增器检测器测量薄膜厚度

摘要 通过透射和计数 β 射线和 X 射线辐射进行薄膜厚度测量的质量控制已达到极具竞争力的精度，其值达到 0.2%。然而，当被测薄膜的衰减强度超过 90% 时，计算 β 或 X 射线辐射的方法会导致精度急剧下降至 30%。这项工作提出了一种使用三重气体电子倍增器检测器 (3GEM) 提供的能量分布信息来获取和分析铝和铜薄膜厚度的新方法。该方法是基于背景探测产生的朗道分布峰值与通过 55Fe 辐射源发射的薄膜的辐射透射产生的软 X 射线光子的高斯分布峰值的比值。