We present an experimental and numerical study of the optical properties of nanofabricated samples with layered dielectric structures. The samples, which contain periodic arrays of silicon disks over a flat layer of silicon dioxide on a silicon substrate, present diffraction and thin film interference effects. Well-defined circular fringes that modulate the intensity of the diffraction orders are observed in the far-field angular distribution of scattered light. We also find that although the angle of incidence modulates the intensity of the observed circular ring patterns, it has little or no effect on their angular position. The problem is modeled theoretically through numerical calculations based on a Rayleigh method.

中文翻译：

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用圆柱形结构的周期性阵列观察层状样品的衍射图样中的塞勒尼环。

我们提出了具有分层介电结构的纳米加工样品的光学性质的实验和数值研究。样品在硅基板上的二氧化硅平层上包含周期性的硅片阵列，具有衍射和薄膜干涉效应。在散射光的远场角分布中观察到了定义良好的圆形条纹，可调节衍射级的强度。我们还发现，尽管入射角调节了观察到的圆环图案的强度，但对其角度位置几乎没有影响。该问题是通过基于瑞利方法的数值计算从理论上建模的。