Formation of Au-Ag alloy nanoparticles in TiN thin films is demonstrated through sequential implantation of Au and Ag ions. The irradiations were done with 200 keV Au ions at fluence of 1.0 × 10¹⁶ ions/cm² and 150 keV Ag ions to the fluences in the range of 0.7–1.3 × 10¹⁷ ions/cm². It was found that irradiations introduce around 1.5 at.% of gold and up to ~20 at.% of silver species causing also the significant sputtering of the surface. TiN surface besides the topographic undergoes chemical changes. The presence of silver and gold is confirmed by photoemission spectroscopy showing that the implanted ions did not form any kind of compound with the surrounding matrix. Electron microscopy evidenced the formation of crystalline and quasi-spherical particles with dimensions below 10 nm. Elemental analysis revealed that the obtained nanoparticles present Au-Ag alloys, with two elements mixed over the whole volume of the particles in different Au:Ag ratios.

通过顺序注入金和银离子，可以证明在TiN薄膜中形成金-银合金纳米颗粒。用200 keV的Au离子以1.0×10 ¹⁶ 离子/ cm ²的通量和150 keV的Ag离子进行辐照，通量在0.7–1.3×10 ¹⁷ 离子/ cm ²的范围内。发现辐照会引入约1.5 at。％的金和多达〜20 at。％的银，这也会引起表面的大量溅射。除形貌外，TiN表面还会发生化学变化。通过光发射光谱法证实了银和金的存在，表明注入的离子未与周围的基质形成任何种类的化合物。电子显微镜证明尺寸小于10nm的晶体和准球形颗粒的形成。元素分析表明，所获得的纳米颗粒具有Au-Ag合金，其中两种元素以不同的Au：Ag比例混合在整个颗粒体积中。