Metal halide perovskite solar cells (PSCs) have rapidly evolved over the past decade to become a photovoltaic technology on the cusp of commercialization. In the process, numerous fabrication strategies have been explored with the goal of simultaneously optimizing for device efficiency, stability, and scalability. Atomic layer deposition (ALD) and chemical vapor deposition (CVD) have proven to be effective tools for the fabrication of various components of PSCs. This review article examines the application of ALD and CVD for the deposition and modification of charge transport layers, passivation layers, absorber materials, encapsulants, and electrodes. It outlines the use of these vapor deposition techniques in state-of-the-art, multi-junction solar cell devices, and also contains a discussion of the stability of metal halide perovskite materials under ALD and CVD conditions based on in situ characterization reported in literature. This article concludes with insights into future ALD and CVD research directions that could be undertaken to further aid the deployment of PSCs in emerging solar photovoltaic markets.

中文翻译：

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钙钛矿太阳能电池原子层沉积和化学气相沉积的应用

在过去的十年中，金属卤化物钙钛矿太阳能电池（PSC）迅速发展，已成为商业化风口浪尖的光伏技术。在此过程中，为了同时优化器件效率，稳定性和可扩展性，已经探索了多种制造策略。原子层沉积（ALD）和化学气相沉积（CVD）已被证明是制造PSC各种组件的有效工具。这篇综述文章探讨了ALD和CVD在电荷传输层，钝化层，吸收剂材料，密封剂和电极的沉积和改性中的应用。它概述了这些气相沉积技术在最新的多结太阳能电池设备中的使用，文献报道了原位表征。本文以对未来ALD和CVD研究方向的见解作为结束，这些研究方向可以用来进一步帮助PSC在新兴的太阳能光伏市场中进行部署。