A new method for accurately characterizing the tip geometry of critical dimension atomic force microscopy (CD-AFM) has been introduced. A sample type IVPS100-PTB whose line features have vertical sidewall, round corner with a radius of approx. 5 ∼ 6 nm and very low surface roughness has been applied as the tip characterizer. The geometry of the line features has been accurately and traceably calibrated to the lattice constant of crystal silicon. In this paper, detailed measurement strategies and data evaluation algorithms have been introduced, particularly concerning several important influence factors such as the line width roughness of the tip characterizer, measurement noise, measurement point density, and the calculation of the averaged tip geometry. Thorough experimental studies have been carried out, indicating high measurement accuracy of the developed method. For instance, tip geometry of a probe type CDR120 with a nominal tip diameter of 120 nm is reconstructed using tw...

中文翻译：

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临界尺寸原子力显微镜中的精确针尖表征

介绍了一种精确表征临界尺寸原子力显微镜（CD-AFM）尖端几何形状的新方法。IVPS100-PTB型样本，其线条特征具有垂直侧壁，圆角，半径大约为1。5〜6 nm和非常低的表面粗糙度已被用作尖端特征。线条特征的几何形状已精确且可追溯地校准为晶体硅的晶格常数。本文介绍了详细的测量策略和数据评估算法，特别是涉及几个重要的影响因素，例如尖端特征分析仪的线宽粗糙度，测量噪声，测量点密度以及平均尖端几何形状的计算。已经进行了详尽的实验研究，说明所开发方法的测量精度很高。例如，使用十二种方法重建标称尖端直径为120 nm的CDR120型探针的尖端几何形状。