A new measuring method for uniform scanning is proposed in this paper. This method uses a moving light field to establish the relationship between displacement and time, and the displacement is measured by the time difference of the traveling wave signal. The high-precision moving light field is configured by the time and spatial orthogonal modulation of the light intensity. Experiments verified the feasibility of the proposed sensor, and the primary measurement error components were summarized. Combined with the experimental results and the mathematical model, the error rule of the uniformity of the moving light field was analyzed in detail, and the optimization scheme of a differential structure was proposed. Finally, a differential structure sensor was fabricated with a pitch of 0.6 mm in the range of 120 mm. After optimizing the design and the error correction, the measurement accuracy reached ±0.4 µm with a 1 nm resolution within the range of 120 mm, and the results demonst...

中文翻译：

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基于均匀扫描运动光场的高精度位移传感器研究

提出了一种新的均匀扫描测量方法。该方法使用移动光场来建立位移与时间之间的关系，并通过行波信号的时间差来测量位移。高精度的移动光场由光强度的时间和空间正交调制构成。实验验证了该传感器的可行性，并总结了主要的测量误差分量。结合实验结果和数学模型，详细分析了运动光场均匀性的误差规律，提出了差分结构的优化方案。最终，制造了间距为120 mm的0.6 mm的差动结构传感器。