Abstract This study developed a flexible graphene micro-heater that can be used for high efficient temperature control and has outstanding long-term performance using ultrafast laser ablation. The input voltages (V), electrode widths (W), and electrode patterns (2–4 finger) were discussed to determine their effects on electrothermal response and switching performance of the micro-heaters. The experimental results confirmed the outstanding performance of the micro-heaters during on−off operation under varying input voltages. At W = 500 μm, time to steady state tss were less than 3 s for the input voltages from 10 V to 30 V under varying electrode patterns. The micro-heater exhibited a superior heating rate of 15.7 °C/s using ultrafast laser ablation. The experimental results revealed that the increasing rate of heater temperature with respect to input voltage increased as the number of electrode fingers decreased, especially under high input voltages. The thermal cycling and bending experiments revealed excellent temperature stability and durability (

中文翻译：

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柔性石墨烯微加热器的电热响应及可靠性研究

摘要 本研究开发了一种柔性石墨烯微型加热器，可用于高效的温度控制，并使用超快激光烧蚀具有出色的长期性能。讨论了输入电压 (V)、电极宽度 (W) 和电极图案（2-4 指）以确定它们对微型加热器的电热响应和开关性能​​的影响。实验结果证实了微加热器在不同输入电压下开关操作期间的出色性能。在 W = 500 μm 时，在不同电极模式下，输入电压从 10 V 到 30 V 达到稳态的时间 tss 小于 3 秒。使用超快激光烧蚀，微型加热器表现出 15.7 °C/s 的优越加热速率。实验结果表明，加热器温度相对于输入电压的增加速率随着电极指数量的减少而增加，特别是在高输入电压下。热循环和弯曲实验显示出优异的温度稳定性和耐久性（