Manufacture of large-scale patterned nanomaterials via top-down techniques, such as printing and slurry coating, have been used for fabrication of miniaturized gas sensors. However, the reproducibility and uniformity of the sensors in wafer-scale fabrication are still a challenge. In this work, a “top-down” and “bottom-up” combined strategy was proposed to manufacture wafer-scaled miniaturized gas sensors with high-throughput by in-situ growth of Ni(OH)₂ nanowalls at specific locations. First, the micro-hotplate based sensor chips were fabricated on a two-inch (2”) silicon wafer by micro-electro-mechanical-system (MEMS) fabrication techniques (“top-down” strategy). Then a template-guided controllable de-wetting method was used to assemble a porous thermoplastic elastomer (TPE) thin film with uniform micro-sized holes (relative standard deviation (RSD) of the size of micro-holes <3.5 %, n > 300), which serves as the patterned mask for in-situ growing Ni(OH)₂ nanowalls at the micro-hole areas (“bottom-up” strategy). The obtained gas microsensors based on this strategy showed great reproducibility of electric properties (RSD < 0.8%, n = 8) and sensing response toward real-time H₂S detection (RSD < 3.5%, n = 8).

通过自上而下的技术（例如印刷和浆料涂布）制造大规模图案化纳米材料已被用于制造微型气体传感器。然而，晶圆级制造中传感器的再现性和均匀性仍然是一个挑战。在这项工作中，提出了一种“自上而下”和“自下而上”的组合策略，通过 Ni(OH) _{2 的}原位生长来制造具有高通量的晶圆级小型化气体传感器。特定位置的纳米壁。首先，基于微热板的传感器芯片通过微机电系统 (MEMS) 制造技术（“自上而下”策略）在两英寸（2”）硅晶片上制造。然后采用模板引导的可控去湿方法组装具有均匀微孔（微孔尺寸的相对标准偏差（RSD）<3.5%，n  >300 ）的多孔热塑性弹性体（TPE）薄膜。)，用作在微孔区域原位生长 Ni(OH) ₂纳米壁的图案化掩模（“自下而上”策略）。基于该策略获得的气体微传感器显示出良好的电学特性重现性（RSD < 0.8%，n  = 8）和对实时 H _{2 的}传感响应S 检测（RSD < 3.5%，n  = 8）。