Highly sensitive and selective hydrogen sulfide (H₂S) sensors based on hierarchical highly ordered SnO₂ nanobowl branched ZnO nanowires (NWs) were synthesized via a sequential process combining hard template processing, atomic-layer deposition, and hydrothermal processing. The hierarchical sensing materials were prepared in situ on microelectromechanical systems, which are expected to achieve high-performance gas sensors with superior sensitivity, long-term stability and repeatability, as well as low power consumption. Specifically, the hierarchical nanobowl SnO₂@ZnO NW sensor displayed a high sensitivity of 6.24, a fast response and recovery speed (i.e., 14 s and 39 s, respectively), and an excellent selectivity when detecting 1 ppm H₂S at 250 °C, whose rate of resistance change (i.e., 5.24) is 2.6 times higher than that of the pristine SnO₂ nanobowl sensor. The improved sensing performance could be attributed to the increased specific surface area, the formation of heterojunctions and homojunctions, as well as the additional reaction between ZnO and H₂S, which were confirmed by electrochemical characterization and band alignment analysis. Moreover, the well-structured hierarchical sensors maintained stable performance after a month, suggesting excellent stability and repeatability. In summary, such well-designed hierarchical highly ordered nanobowl SnO₂@ZnO NW gas sensors demonstrate favorable potential for enhanced sensitive and selective H₂S detection with long-term stability and repeatability.

通过结合硬模板处理、原子层沉积和水热处理的顺序工艺合成基于分级高度有序的 SnO ₂纳米碗支化 ZnO 纳米线 (NW) 的高灵敏度和选择性硫化氢 (H ₂ S) 传感器。分层传感材料在微机电系统上原位制备，有望实现具有优异灵敏度、长期稳定性和可重复性以及低功耗的高性能气体传感器。具体而言，分级纳米碗 SnO ₂ @ZnO NW 传感器显示出 6.24 的高灵敏度、快速的响应和恢复速度（即分别为 14 s 和 39 s），以及在检测 1 ppm H ₂时具有出色的选择性S 在 250 °C 时，其电阻变化率（即 5.24）是原始 SnO ₂纳米碗传感器的2.6 倍。传感性能的提高可归因于比表面积的增加、异质结和同质结的形成，以及 ZnO 和 H ₂ S之间的额外反应，这些都通过电化学表征和能带排列分析得到证实。此外，结构良好的分层传感器在一个月后保持稳定的性能，表明其具有出色的稳定性和可重复性。总之，这种精心设计的分层高度有序的纳米碗 SnO ₂ @ZnO NW 气体传感器显示出提高灵敏度和选择性 H _{2 的}有利潜力S 检测具有长期稳定性和可重复性。