Silicon carbide (SiC) is well known as an excellent material for high performance optical applications because it offers many advantages over other commonly used glasses and metals. The excellent attributes of SiC include high strength, high hardness, low density, high thermal resistance, and low coefficient of thermal expansion. The effect of CO₂ laser and its tool path on SiCwere investigated. The process started by creating laser pre-cracks on the desired pattern. Subsequently, laser assisted polishing was conducted on the same tool path. The surface showed a sharp increase in material removal in the areas with laser pre-cracks. This high difference in material removal was used not only to fabricate a ⌀ 1100 mm concave mirror with 127 μm in depth but also to generate macro and micro patterns. Grooves from 2 mm to 200 μm in width and 5 μm to 20 μm depth were successfully generated.

碳化硅（SiC）是众所周知的用于高性能光学应用的出色材料，因为与其他常用的玻璃和金属相比，碳化硅具有许多优势。SiC的优良特性包括高强度，高硬度，低密度，高耐热性和低热膨胀系数。CO ₂的作用研究了激光及其在SiC上的加工路径。该过程开始于在所需图案上产生激光预裂纹。随后，在相同的刀具路径上进行激光辅助抛光。在出现激光预裂的区域中，表面去除材料的数量急剧增加。这种材料去除率的高差异不仅用于制造深度为127μm的⌀1100 mm凹面镜，而且还用于生成宏观和微观图案。成功生成了宽度从2毫米到200微米，深度从5微米到20微米的凹槽。