We elucidated implicate ordering of amorphous Sn-doped In 2 O 3 films grown on glass substrates during the phase transition to polycrystalline by postannealing from room temperature to 300 °C for 55 min. X-ray diffraction with two-dimensional detector revealed the following. First, fine grains are developed. Second, crystallites are grown with (222) preferential orientation associated with growing crystallites along (222) plane. Simultaneously, the alignment between grains is also promoted. Finally, while retaining the alignments among crystallites, long-range ordering was improved within the crystallites. Based on those findings, as a well-defined crystallization temperature, we propose a temperature at which the above-mentioned final stage starts.

中文翻译：

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通过原位二维X射线衍射测量确定隐含阶数从非晶Sn掺杂到In 2 O 3多晶薄膜的演变

我们阐明了从室温到300°C的后退火55分钟，在向多晶相转变的过程中，玻璃衬底上生长的非晶Sn掺杂In 2 O 3薄膜的隐式排序。用二维检测器进行的X射线衍射显示以下内容。首先，发展出细晶粒。其次，微晶以（222）优先取向生长，该优先取向与沿（222）面生长的微晶相关。同时，也促进了晶粒之间的排列。最后，在保持微晶之间的对准的同时，改善了微晶内的长程有序。基于这些发现，作为明确的结晶温度，我们提出了上述最终阶段开始的温度。