We present a spring-shaped tunable inductor, fabricated using a silicon-on-insulator (SOI) multiuser micro-electromechanical system process. The inductor has a simple planar design and is monolithically integrated in the SOI wafer. The inductor is tuned using a thermal actuator on the same silicon structure layer. Thus, the complexity and cost of fabrication are greatly minimized. The device is compact, with dimensions of 0.90 mm × 0.55 mm. In addition to cost-effective design and small surface area, the device has good tuning range and Q-factor. The experimental results show that the inductor can be tuned to 20%, 17%, and 15% at 2, 3, and 5 GHz, respectively. In air at 0 and 11.5 V, Q-factors of 7.27 and 4.64 obtained at 2 GHz, and 7.21 and 5.92 at 5 GHz. The series resonance frequency is >20 GHz.

中文翻译：

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使用微机电电热执行器调谐的弹簧形电感器


我们提出了一种弹簧形可调电感器，采用绝缘体上硅 (SOI) 多用户微机电系统工艺制造。该电感器采用简单的平面设计，单片集成在 SOI 晶圆中。使用同一硅结构层上的热致动器来调谐电感器。因此，制造的复杂性和成本大大降低。该器件结构紧凑，尺寸为0.90 mm × 0.55 mm。除了经济高效的设计和较小的表面积之外，该器件还具有良好的调谐范围和 Q 因子。实验结果表明，电感器在 2、3 和 5 GHz 下可分别调谐到 20%、17% 和 15%。在空气中，电压为 0 和 11.5 V 时，2 GHz 时的 Q 因数分别为 7.27 和 4.64，5 GHz 时的 Q 因数分别为 7.21 和 5.92。串联谐振频率为>20 GHz。