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Formation and optimization of deposition surface shape during fused silica glass synthesis by chemical vapor deposition
International Journal of Applied Glass Science ( IF 2.1 ) Pub Date : 2019-12-26 , DOI: 10.1111/ijag.14771 Yaosong Huang 1
International Journal of Applied Glass Science ( IF 2.1 ) Pub Date : 2019-12-26 , DOI: 10.1111/ijag.14771 Yaosong Huang 1
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This paper investigates the effects of deposition surface shape on temperature distribution of fused silica glass by SiCl4 chemical vapor deposition and performs the optimization of deposition surface shape to obtain the glass with a small temperature gradient. The computational model is first developed to describe the complicated physical and chemical phenomenon in the system. Numerical simulations are then performed to evaluate the effects of SiCl4 injection position on flame characteristics and SiO2 deposition rate. It is found that the SiO2 deposition rates with the unimodal, uniform, and bimodal distributions are obtained when SiCl4 is injected from the central, secondary layer and fourth layer nozzles, respectively. The deposition surface shape is mainly determined by the gas temperature gradient and particle number density near the deposition surface. Thereafter, the temperature distributions in synthetic silica glass are presented for the cases with convex, flat, and concave deposition surface shapes. Large temperature gradients exist at the side of glass if the convex and concave surfaces are formed, although a high temperature uniformity is obtained in the center of glass for the convex deposition surface. The optimal surface shape that has a very small temperature gradient in glass is obtained by the optimization of deposition surface depth.
中文翻译：
化学气相沉积法合成石英玻璃过程中沉积表面形状的形成与优化
通过SiCl 4化学气相沉积研究了沉积表面形状对熔融石英玻璃温度分布的影响，并对沉积表面形状进行了优化，从而获得了温度梯度小的玻璃。首先开发计算模型来描述系统中复杂的物理和化学现象。然后进行数值模拟以评估SiCl 4注入位置对火焰特性和SiO 2沉积速率的影响。发现当SiCl 4时，SiO 2的沉积速率具有单峰，均匀和双峰分布。分别从中央，第二层和第四层喷嘴注入。沉积表面的形状主要取决于沉积表面附近的气体温度梯度和颗粒数密度。此后，给出了具有凸起，平坦和凹入沉积表面形状的情况下合成石英玻璃中的温度分布。如果形成凸面和凹面，则在玻璃的侧面存在较大的温度梯度，尽管在玻璃中心的凸状沉积表面获得了较高的温度均匀性。通过优化沉积表面深度可以获得在玻璃中具有非常小的温度梯度的最佳表面形状。
更新日期：2019-12-26
中文翻译：
化学气相沉积法合成石英玻璃过程中沉积表面形状的形成与优化
通过SiCl 4化学气相沉积研究了沉积表面形状对熔融石英玻璃温度分布的影响，并对沉积表面形状进行了优化，从而获得了温度梯度小的玻璃。首先开发计算模型来描述系统中复杂的物理和化学现象。然后进行数值模拟以评估SiCl 4注入位置对火焰特性和SiO 2沉积速率的影响。发现当SiCl 4时，SiO 2的沉积速率具有单峰，均匀和双峰分布。分别从中央，第二层和第四层喷嘴注入。沉积表面的形状主要取决于沉积表面附近的气体温度梯度和颗粒数密度。此后，给出了具有凸起，平坦和凹入沉积表面形状的情况下合成石英玻璃中的温度分布。如果形成凸面和凹面，则在玻璃的侧面存在较大的温度梯度，尽管在玻璃中心的凸状沉积表面获得了较高的温度均匀性。通过优化沉积表面深度可以获得在玻璃中具有非常小的温度梯度的最佳表面形状。
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